JPH0749396Y2 - 圧力センサ - Google Patents
圧力センサInfo
- Publication number
- JPH0749396Y2 JPH0749396Y2 JP15113289U JP15113289U JPH0749396Y2 JP H0749396 Y2 JPH0749396 Y2 JP H0749396Y2 JP 15113289 U JP15113289 U JP 15113289U JP 15113289 U JP15113289 U JP 15113289U JP H0749396 Y2 JPH0749396 Y2 JP H0749396Y2
- Authority
- JP
- Japan
- Prior art keywords
- relay terminal
- terminal block
- diaphragm
- pressure sensor
- strain gauge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 2
- 238000000576 coating method Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 description 7
- 239000000853 adhesive Substances 0.000 description 4
- 230000001070 adhesive effect Effects 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 229910052814 silicon oxide Inorganic materials 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000004382 potting Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15113289U JPH0749396Y2 (ja) | 1989-12-29 | 1989-12-29 | 圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15113289U JPH0749396Y2 (ja) | 1989-12-29 | 1989-12-29 | 圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0390045U JPH0390045U (en]) | 1991-09-13 |
| JPH0749396Y2 true JPH0749396Y2 (ja) | 1995-11-13 |
Family
ID=31697445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15113289U Expired - Fee Related JPH0749396Y2 (ja) | 1989-12-29 | 1989-12-29 | 圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0749396Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103656971A (zh) * | 2013-12-08 | 2014-03-26 | 无锡市安捷脚手架有限公司 | 健身弹跳设备 |
-
1989
- 1989-12-29 JP JP15113289U patent/JPH0749396Y2/ja not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103656971A (zh) * | 2013-12-08 | 2014-03-26 | 无锡市安捷脚手架有限公司 | 健身弹跳设备 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0390045U (en]) | 1991-09-13 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |